Gas Recycle Purification System
This gas recycling purification system is designed to recycle and purify the inert gas in the glove box by removing moisture, oxygen, organic solvent, dust and the like generated in the glove box. Oxygen can be removed by reaction with a platinum or reduced copper catalyzer. The moisture is removed by an adsorption tower. Catalyzers and adsorbents are regenerated automatically or manually. The system is available in a single unit type and double unit type with a standby unit.
Specifications
Example gases that are removed from inert gases such as nitrogen, argon or helium include moisture, oxygen, CO₂ and organic gas.
| Oxygen/Moisture level | 100 ~ 1.47 ppb or less |
|---|---|
| Dust | 99.97% removal of 0.3 µ size particles |
| Circulating air flow | 10 ~ 300 Nm³/hr |
| Material | SUS 304 |
| Option | N₂ removal |
Data
ppm=1×10⁻⁴, ppb=1×10⁻⁷
