株式会社 美和製作所 Miwa, Since 1975, Made in Japan, Atmosphere Technology Company

gas recycle purfication system | ガス循環精製装置

Outline | 概要

  This gas recycling purification system is designed to recycle and purify both the inert gas in the glove box and moisture, oxygen, an organic solvent, dust and the like generated in the glove box.Oxygen can be removed by a method of reaction with a catalyzer of platinum, or by a method of reaction with a catalyzer of reductant copper. The moisture is removed as adsorbed in a purification tower.
Catalyzers and adsorbents are regenerated by an automatic regeneration method or by a manual regeneration method.
There are available a single unit type and a double unit type having a stand-by system, one of which is selected according to your specifications.
 

Feature | 特徴

  Examples of gas to be purified include moisture, oxygen, CO2, organic gas in inert gas such as nitrogen, argon or helium.
 
 
Oxygen/moisture level : 100 ppb~1.47ppb or less  
 
Dust : 0.3μ99.97% removal  
 
Recycling purification air amount : 10 ~ 300 Nm3/hr  
 
Material : SUS 304  
 
Option : Removal of N2  

Specs | 仕様

  ppm=1×10-4、ppb=1×10-7